|
週次 |
日期 |
單元主題 |
|
Week 2 |
9/21 |
Introduction to MEMS and emerging applications.
Substrate materials. |
|
Week 3 |
9/28 |
Middle Autumn Festival |
|
Week 4 |
10/05 |
Parallel to microelectronics, Static
Photolithography |
|
Week 5 |
10/12 |
Bulk micromachining vs. Surface micromachining
|
|
Week 6 |
10/19 |
RF MEMS and mechanical analysis, residual stresses
Layout techniques |
|
Week 7 |
10/26 |
EM modeling, transmission lines and switches |
|
Week 8 |
11/02 |
Design issues of switches
Deposition methods |
|
Week 9 |
11/09 |
Midterm project |
|
Week 10 |
11/16 |
Varactors and tunable oscillators
Etching |
|
Week 11 |
11/23 |
Micromachined inductors
Electroplating |
|
Week 12 |
11/30 |
Characterizations and models
Testing platform configuration |
|
Week 13 |
12/07 |
Polymers and flexible MEMS |
|
Week 14 |
12/14 |
Applications and problem determinations |
|
Week 15 |
12/21 |
System integration |
|
Week 16 |
12/28 |
System integration |
|
Week 17 |
1/04 |
Final project |